Applied Materials
Centura 5200 DPS Metal
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Applied Materials Centura 5200 DPS Metal is a metal etcher that uses a decoupled plasma source. The Applied Materials Centura 5200 DPS Metal is designed for 6-inch wafers.[1]
What it is
The Centura 5200 DPS Metal etcher uses a decoupled plasma source (DPS) and is configured for six-inch (150 mm) wafers.[1]
The Centura 5200 DPS+ variant, a later iteration of the platform, is designed for 200 mm and 300 mm wafer processing and incorporates advanced plasma control for improved uniformity and pattern fidelity.[2]
How it works
The system uses Deep Plasma Source (DPS) technology to produce a high-density plasma for metal etching. The DPS allows precise modulation of etching power, pressure, and temperature, resulting in cleaner etches, fewer defects, and improved pattern fidelity.[2]
Where it fits in the process flow
Applications
The DPS+ variant specifically supports etching copper, tungsten, aluminum, and other materials commonly used in semiconductor manufacturing.[2]
What do the numbers mean?
Wafer handling1
Configuration & options2
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Centura 5200 DPS+ | — | — | Metal etching system with DPS technology, supports SECS/GEM, accommodates 200mm and 300mm wafers | manufacturingtomorrow.com[2] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What metal materials can be etched on the Centura 5200 DPS+?
The DPS+ supports etching of copper, tungsten, aluminum, and other materials commonly used in semiconductor manufacturing.[2]
Does the Centura 5200 DPS+ support SECS/GEM communication?
Yes, the system uses SECS/GEM protocol to interface with factory control systems such as Manufacturing Execution Systems (MES).[2]
What is the role of the EIGEMBox with the Centura 5200 DPS+?
The EIGEMBox acts as a communication interface that connects the etcher with factory systems, enabling efficient data transfer, error detection, and centralized monitoring.[2]
Not publicly documented
The following facts about the Centura 5200 DPS Metal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura 5200 DPS Metal are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Centura 5200 DPS Metal are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Centura 5200 DPS Metal are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Centura 5200 DPS Metal is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Centura 5200 DPS Metal are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]manufacturingtomorrow.com — manufacturingtomorrow.commanufacturingtomorrow.com
Last updated Oct 2, 2026.
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