Waferpedia

Tool family

MKS Astron i

MKS1 entry

Models in this family

  1. The MKS Astron i is a generator, specifically described as a high-performance RF generator.

    Cited variants

    DesignationGenerationVintageChangesSource
    AX7671-85——Sub-model designator for high-performance RF generatorspwindustrial.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]spwindustrial.comspwindustrial.com