Waferpedia

MKS

Astron i

MKS Astron i family
Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

MKSAstron i
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What it is

The MKS Astron i is an RF generator.[2][1]

What do the numbers mean?

No specifications recorded yet

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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
AX7671-85——Sub-model designator for high-performance RF generatorspwindustrial.com[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Astron i are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No specifications for the Astron i are on record.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Astron i are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Astron i are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Astron i are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Astron i is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]spwindustrial.com — spwindustrial.comspwindustrial.com
  2. [2]Equipment inventory listing
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Last updated Oct 3, 2026.

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