Tool family
SUSS Alignment is a mask alignment tool line from SUSS MicroTec. SUSS Mask Alignment systems are designed for substrates up to 300 mm and combine alignment accuracy with exposure optics.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| MA300 Gen3 | Gen3 | — | Automated mask aligner platform for 300 mm and 200 mm wafers. | suss.com[1] |
| MA200 Gen3 | Gen3 | — | Automated mask aligner for wafers up to 200 mm. | suss.com[1] |
| MA12 Gen3 | Gen3 | — | Semi-automated mask alignment system for wafers up to 300 mm. | suss.com[1] |
| MJB4 | — | — | Manual system for substrates and pieces up to 100 mm. | suss.com[1] |
| MA/BA Gen4 Series | Gen4 | — | Semi-automated mask and bond aligner platform with MA/BA Gen4 and MA/BA Gen4 Pro configurations. | suss.com[1] |