Waferpedia

Tool family

Temescal UEFC-4900

The Temescal UEFC-4900 is listed as a Temescal system model in the company’s systems lineup, but the provided sources do not give model-specific technical details for it.

Models in this family

  1. The Temescal UEFC-4900 is an electron-beam physical vapor deposition system used to deposit thin films in a vacuum environment.