YES
PBX4-300
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The YES PBX4-300 is a fully automated thermal processing system from Yield Engineering Systems. The YES PBX4-300 performs polyimide anneal, BCB anneal, copper anneal, and vacuum bake operations. The YES PBX4-300 handles 300mm and 200mm wafers.[1][2]
What it is
Where it fits in the process flow
General reference — not yet source-verifiedThe YES PBX4-300 is used in back-end-of-line (BEOL) and advanced packaging flows. Polyimide and BCB anneal steps occur after spin-coating of these polymer dielectrics, typically following metal deposition or as part of redistribution layer (RDL) formation. Copper anneal is performed after copper electroplating to relieve stress and reduce resistivity. Vacuum bake is applied before or after other processes to ensure low moisture content and improve adhesion. The machine sits between coating or plating tools and subsequent photolithography or final-test steps.
Applications
General reference — not yet source-verifiedPolyimide anneal cures the polymer to achieve its final mechanical and dielectric properties. BCB anneal similarly cures benzocyclobutene, a low-k dielectric used in interlayer insulation and passivation. Copper anneal reduces film stress and grain growth in plated copper lines. Vacuum bake removes moisture and volatile residues from wafers, improving process consistency and preventing outgassing in subsequent vacuum processes.
- Polyimide anneal
- BCB anneal
- Copper anneal
- Vacuum bake
What do the numbers mean?
Vacuum & pumping2
- Product line
- Fully Automated 300mm and 200mm Polyimide/BCB/Copper Anneal/Vacuum Bake System[1]2 sources
Wafer handling1
Configuration & options3
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| YES-PBX4-300 | — | — | — | web.archive.org[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the PBX4-300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PBX4-300 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the PBX4-300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PBX4-300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PBX4-300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PBX4-300 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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