Waferpedia

YES

450 PB 12 Polyimide

Thermal / Diffusion300mmYES 450 family
Research Quality: 40% complete

The YES 450 PB 12 Polyimide is a thermal/diffusion bake oven. The YES 450 PB 12 Polyimide is a batch process bake oven with capacity for two 25-wafer cassettes and 300mm FOUPs. The YES 450 PB 12 Polyimide uses wafer cassettes loaded manually into the machine.[1][2]

YES450 PB 12 Polyimide
No photo available yet

Wafer size

300mm

Power

208V, 3 Phase 50/60 Hz, 40 amps[2]

Vacuum

Alternate vacuum valve for process vacuum[2]

Gas delivery

1 standard up to 3 optional[2]

What it is

The YES 450 PB 12 Polyimide is a thermal and diffusion batch bake oven.[1]

The YES 450 PB 12 Polyimide is configured for 300 mm wafers and is a batch process bake oven with capacity for two 25 wafer cassettes.[1][2]

How it works

The YES 450 PB 12 Polyimide uses wafer cassettes for manual loading and processes wafers in batches.[2][1]

The YES 450 PB 12 Polyimide has a chamber made of 316L stainless steel and uses an air-cooled chamber with external forced air convection.[2][1]

Where it fits in the process flow

The YES 450 PB 12 Polyimide supports operation from ambient to 450°C, with an option for operation to 550°C.[2][1]

Applications

The YES 450 PB 12 Polyimide is used for polyimide bake processing.[2]

What do the numbers mean?

Power & electrical1

Voltage
208V, 3 Phase 50/60 Hz, 40 amps[2]
Accurate?

Vacuum & pumping4

Alternate vacuum valve for process vacuum[2]
Accurate?
Vacuum plumbing with VCR[2]
Accurate?
Vacuum
Alternate vacuum valve for process vacuum[1]
Accurate?
Vacuum plumbing
VCR[1]
Accurate?

Wafer handling5

Wafer size
Capacity is two 25 wafer cassettes in a batch process (50 wafers at a time) - 300mm FOUP[2]
Accurate?
Wafer size
Uses wafer cassette (manually bring wafer to the machine, then load wafers inside)[2]
Accurate?
Wafer size
300mm[1]
Accurate?
Capacity
Two 25-wafer cassettes in a batch process (50 wafers at a time)[2]
Accurate?
Wafer handling
Uses wafer cassette; wafers are manually brought to the machine and loaded inside[2]
Accurate?

Gas & chemistry5

Process Gas Inputs
1 standard up to 3 optional[2]
Accurate?
Preheated N, (Process Gas)[2]
Accurate?
Mass Flow Controllers
optional, up to 3[2]
Accurate?
Gas delivery
1 standard up to 3 optional[1]
Accurate?
Process gas
Preheated N2[2]
Accurate?

Control & software3

Controller Assembly[2]
Accurate?
Color Touch Screen Operator Interface[2]
Accurate?
Number of Recipes
8 temperature profiles (up to 200 with YES - DAQ-LR option)[2]
Accurate?

Dimensions & facilities1

Includes full-dimension 100-micron inlet for preheated laminar nitrogen purge[2]
Accurate?

Configuration & options18

Chamber Material
316L Stainless Steel[2]
Accurate?
Operation Temperature
ambient to 450°C (option high temp version: Ambient to 550°()[2]
Accurate?
Dual door 0-Rings with nitrogen purge between the seals, eliminates oxygen leakage through door seal[2]
Accurate?
Laminar Flow Filter
100 micron Mott'" plate filter[2]
Accurate?
Cleanliness
particle reduction in most applications[2]
Accurate?
Manual Throttle Valve assembly[2]
Accurate?
Air-cooled chamber with external forced air convection[2]
Accurate?
Swagelok 1" lines and valves[2]
Accurate?
Shut-off switch located below door to shut off heaters if door is opened[2]
Accurate?
Dual Condensate Filter Assembly[2]
Accurate?
OEM
YES[2]
Accurate?
Model
450 PB 12[2]
Accurate?
Category
Thermal / Diffusion[1]
Accurate?
FOUP compatibility
300mm FOUP[2]
Accurate?
Operation temperature
Ambient to 450°C[2]
Accurate?
Temperature
Ambient to 450°C with LED temperature and set point displays[2]
Accurate?
Operation Temperature
Ambient to 450° C with LED temperature readout and ramp-up/down capability[2]
Accurate?
Oxygen Concentration
10 ppm over background[2]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Process Gas Inputs1 standard up to 3 optional[2]
  • ConfigurationPreheated N, (Process Gas)[2]
  • Mass Flow Controllersoptional, up to 3[2]
  • ConfigurationAlternate vacuum valve for process vacuum[2]
  • ConfigurationVacuum plumbing with VCR[2]
  • Gas delivery1 standard up to 3 optional[1]
  • Process gasPreheated N2[2]
  • VacuumAlternate vacuum valve for process vacuum[1]
  • Vacuum plumbingVCR[1]
  • Voltage208V, 3 Phase 50/60 Hz, 40 amps[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Not publicly documented

The following facts about the 450 PB 12 Polyimide are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 450 PB 12 Polyimide are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 450 PB 12 Polyimide are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 450 PB 12 Polyimide are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 450 PB 12 Polyimide are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 450 PB 12 Polyimide is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]inventory listing
Was this page accurate?

Last updated Oct 7, 2026.

Compare with similar tools

View all →