Waferpedia

Tokyo Electron

NS 300 Z Wafer

NS 300 Z Wafer — Inventory photo
Fig. 01NS 300 Z WaferInventory photo[1]

What is it?

The Tokyo Electron NS 300 Z Wafer Scrubber is a 12-inch wafer scrubber with software version 6.00.26.2 and a 208 AC, 3-phase power rating.

What do the numbers mean?

Power & electrical1

System Power Rating
208 AC, 3 Phase[1]
Accurate?

Control & software1

Software Version
6.00.26.2[1]
Accurate?

Configuration & options2

4 Load Port[1]
Accurate?
HDD not included[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • System Power Rating208 AC, 3 Phase[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the NS 300 Z Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NS 300 Z Wafer are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NS 300 Z Wafer are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NS 300 Z Wafer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NS 300 Z Wafer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NS 300 Z Wafer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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