YES

1000FP

Wet Processing / Clean YES 1000FP family

Research Quality: 50% complete

YES1000FP

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What it is

General reference — not yet source-verified

Plasma cleaning systems use low-pressure gas and radio-frequency energy to generate a plasma that removes surface contaminants or modifies surface chemistry. Such systems are typically batch tools with multiple shelves, allowing simultaneous processing of several substrates.

How it works

The 1000FP is a multi-shelf system that combines plasma uniformity with the ability to switch between Active, Reactive Ion Etching (RIE), or Downstream operation. Downstream operation allows 'electron-free' cleaning for sensitive electronic components.^[1]

Applications

Applications include removal of contaminants such as oil films and metal oxides, surface modification of unlike surfaces, and improvement of adhesion strength. Specific bonds cited include polyethylene to stainless steel, gold deposition to quartz, and wiring to semiconductor chips. Other applications include photoresist removal on CD masters, silicon etching for array alignment, matting clear plastic surfaces, and adhesion of critical automotive components.^[1]

Flat panel industry

What do the numbers mean?

Configuration & options7

System type: Plasma cleaning system^[1]
Line: R-Series Plasma Cleaning Systems (Glen Technologies)^[1]
Model: Glen/YES 1000FP^[1]
Designed use: Designed to accept a range of shelf sizes^[1]
Application focus: Changing needs of the flat panel industry^[1]
Designed use: Accepts a range of shelf sizes^[1]
Application focus: Flat panel industry^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of cleaning system is the YES 1000FP?

The YES 1000FP is a plasma cleaning system, part of the R-Series plasma cleaning systems line from Yield Engineering Systems.^[1]^[2]

What industry is the 1000FP designed for?

The 1000FP is specifically designed to accommodate the changing needs of the flat panel display industry.^[1]^[2]

Not publicly documented

The following facts about the 1000FP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1000FP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 1000FP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 1000FP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1000FP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 1000FP is not on record.
Answerable by: an OEM datasheet or a fab qualification report