Comparison ledger
Hitachi 1305 BSG 3, Tokyo Electron NS 300 Z Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | NS 300 Z WaferTokyo Electron |
|---|---|---|
| OEM | Hitachi | Tokyo Electron |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Tokyo Electron NS 300 |
| Specifications | ||
| Software Version | — | 6.00.26.2[1] |
| System Power Rating | — | 208 AC, 3 Phase[1] |
| Configuration | — | 4 Load Port[1] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →