SPTS
MACS ICP
The SPTS MACS ICP is an 8-inch etcher. The SPTS MACS ICP has an HR chamber. The SPTS MACS ICP uses a cassette-to-cassette MACS loader.[1][2]
What it is
How it works
Where it fits in the process flow
General reference — not yet source-verifiedThe MACS ICP sits in the dry-etch segment of semiconductor manufacturing.
Applications
The MACS ICP is configured for advanced silicon etch with a Bosch process.[5]
What do the numbers mean?
Power & electrical4
- RF Generators:[3]
Vacuum & pumping7
Wafer handling5
- MACS loader for cassette to cassette operation (2 load stations)[3]
Gas & chemistry6
Configuration & options13
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| MACS ICP HR | — | 2001 | HR etch system variant; sources describe it as an HR dry etch system. | hommer.com.tw[4] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationCarousel vacuum load lock[3]
- ConfigurationRF Generators:[3]
- Coil RF powerAdvanced Energy RFG3001, 3kw[3]
- Platen RF powerENI ACG-3B 13.56MHZ, 300w[3]
- ConfigurationGases:[3]
- ConfigurationC4F8 (200 sccm)[3]
- ConfigurationSF6 (1000 sccm)[3]
- ConfigurationO2 (200 sccm)[3]
- ConfigurationAr (50 sccm)[3]
- ConfigurationVacuum System:[3]
- Load lock pumpEbara AAL10[3]
- Chamber pumpEbara A30W[3]
- Turbo pumpLeybold MAG2000CT[3]
- Turbo Pump ControllerLeybold MAG Drive 2000[3]
- Vacuum load lockCarousel vacuum load lock[3]
- GasesC4F8 (200 sccm); SF6 (1000 sccm); O2 (200 sccm); Ar (50 sccm)[3]
- Voltage208 Volts / 60 Hz, 40 Amps/phase[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the MACS ICP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MACS ICP are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the MACS ICP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MACS ICP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MACS ICP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MACS ICP are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]SPTS MACS ICP family | Waferpedia — waferpedia.comwaferpedia.com
- [3]Inventory photo
- [4]hommer.com.tw — hommer.com.twhommer.com.tw
- [5]challentech.com.tw — challentech.com.twchallentech.com.tw
Last updated Oct 9, 2026.
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