Waferpedia

Perkin Elmer

4410

DepositionPerkin Elmer 44xx family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

4410 — Inventory photo
Fig. 014410Inventory photo[1]

What is it?

The Perkin Elmer 4410 is a sputtering system.

What do the numbers mean?

Power & electrical2

Eratron PPS 8210 Plasma Power Supply[1]
Accurate?
Power Supply
Eratron PPS 8210 Plasma Power Supply[1]
Accurate?

Vacuum & pumping1

Key Features
Process proven for III-V substrates; Non-PLC (smaller footprint / easy maintenance); 20 years proven sputter technology; Process data and recipe storage on a hard drive; Easy TC vacuum gauge calibration; Positioning Deposition (optional); GEM/SEC II functions (optional)[3]
Accurate?

Wafer handling2

Wafer Size
Small~8 inch[3]
Accurate?
Process Chamber
Load lock[3]
Accurate?

Configuration & options3

Type
Sputtering Deposition System[2]
Accurate?
Manufacturer
Perkin-Elmer (Ultek Division)[2]
Accurate?
Model
4410 (DeltaTM Cathode Production Sputtering System)[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationEratron PPS 8210 Plasma Power Supply[1]
  • Power SupplyEratron PPS 8210 Plasma Power Supply[1]
  • Key FeaturesProcess proven for III-V substrates; Non-PLC (smaller footprint / easy maintenance); 20 years proven sputter technology; Process data and recipe storage on a hard drive; Easy TC vacuum gauge calibration; Positioning Deposition (optional); GEM/SEC II functions (optional)[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 4410 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4410 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 4410 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 4410 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 4410 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 4410 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]perkin-elmer-sputter.comperkin-elmer-sputter.com
  3. [3]allwin21.comallwin21.com
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Last updated Sep 22, 2026.

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