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Comparison ledger

0020 18455 Partversus4410

Applied Materials 0020 18455 Part, Perkin Elmer 4410, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
4410Perkin Elmer
OEMApplied MaterialsPerkin Elmer
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartPerkin Elmer 44xx
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[1]Eratron PPS 8210 Plasma Power Supply[2]
Type—Sputtering Deposition System[3]
Manufacturer—Perkin-Elmer (Ultek Division)[3]
Model—4410 (DeltaTM Cathode Production Sputtering System)[3]
Wafer Size—Small~8 inch[4]
Process Chamber—Load lock[4]
Power Supply—Eratron PPS 8210 Plasma Power Supply[2]
Key Features—Process proven for III-V substrates; Non-PLC (smaller footprint / easy maintenance); 20 years proven sputter technology; Process data and recipe storage on a hard drive; Easy TC vacuum gauge calibration; Positioning Deposition (optional); GEM/SEC II functions (optional)[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]perkin-elmer-sputter.comperkin-elmer-sputter.com
  4. [4]allwin21.comallwin21.com