Oxford Instruments
OpAL
What is it?
What do the numbers mean?
Power & electrical2
- Downstream 300 W RF plasma head with isolation valve[1]
Wafer handling1
- Single open loop chamber (non-loadlocked)[1]
Gas & chemistry1
- Two channels for metal organic precursors: 1 for water and a plasma head[1]
Control & software1
- Software to run loops of dose/purge cycles[1]
Configuration & options2
- Heated sidewalls 8.25"[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of deposition system is the Oxford OpAL?
It is an atomic layer deposition system.[1]
Does the Oxford OpAL use plasma?
Yes. It includes a downstream 300 W RF plasma head with an isolation valve.[1]
What temperature range is specified for the heated table?
The heated table is specified at 80-300ºC.[1]
How is the chamber configured?
It is a single open-loop chamber that is non-loadlocked.[1]
Not publicly documented
The following facts about the OpAL are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the OpAL are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the OpAL are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the OpAL are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the OpAL are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the OpAL is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Jul 29, 2026.
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