Waferpedia

MRSI

HVM1

Packaging & BondingMRSI HVM1 family
Research Quality: 60% complete

The MRSI-HVM1 is a 1-micron flip-chip die bonder for high volume manufacturing. The MRSI-HVM1 achieves 1 micron accuracy. The MRSI-HVM1 is developed from the MRSI-HVM platform.[1]

HVM1 — web.archive.org
Fig. 01HVM1web.archive.org[1]

What it is

General reference — not yet source-verified

Die bonders are machines used in semiconductor assembly to pick individual dies from a wafer or carrier and place them onto a substrate, leadframe, or package, aligning them with accuracy before bonding them in place through eutectic, epoxy, or other attachment methods.

How it works

The MRSI HVM1 offers several process choices for die bonding, including eutectic bonding, epoxy stamping, UV epoxy dispensing, and in-situ UV curing. The machine is available in a conveyor version that includes an inline conveyor for single fixture or multiple cassette inputs, which can automatically transport large forms of carriers such as those used for Active Optical Cables (AOC) or chip-on-PCB applications, as well as gold-box packaging and chip-on-carrier assembly in fixtures.[1]

A heated head version of the MRSI HVM1 adds a heated head on the right side while the left side retains the standard head. The localized top heating can operate at a fixed temperature or with pulsed heating; this feature is specifically designed for eutectic bonding of multiple dies onto a common carrier without reflowing neighboring solder pads.[1]

Where it fits in the process flow

General reference — not yet source-verified

In a semiconductor assembly line, a die bonder such as the MRSI HVM1 receives singulated dies after wafer dicing (typically on tape or in waffle packs) and places them onto the appropriate substrate, carrier, or package base. The bonded assembly then moves to downstream processes such as wire bonding, encapsulation, or further assembly steps.

Applications

The MRSI HVM1 is designed for specific assembly applications including Chip-on-Carrier (CoC), Chip-on-Submount (CoS), and Chip-on-Baseplate (CoB) bonding using eutectic or epoxy stamping methods. The machine also supports applications such as Active Optical Cables (AOC), gold-box packaging, and similar chip-on-PCB or fixture-based assemblies.[1]

  • Chip-on-Carrier (CoC) assembly
  • Chip-on-Submount (CoS) assembly
  • Chip-on-Baseplate (CoB) assembly
  • Active Optical Cables (AOC)
  • chip-on-printed circuit board (PCB) applications
  • gold-box packaging

What do the numbers mean?

Wafer handling4

supported assembly types
Chip-on-Carrier (CoC), Chip-on-Submount (CoS), and Chip-on-Baseplate (CoB)[1]
Accurate?
Assembly types
Chip-on-Carrier (CoC), Chip-on-Submount (CoS), Chip-on-Baseplate (CoB)[1]
Accurate?
Target applications
Chip-on-Carrier (CoC), Chip-on-Submount (CoS), Chip-on-Baseplate (CoB) assembly[1]
Accurate?
Conveyor version features
Inline conveyor for single fixture or multiple cassette inputs; for AOC, chip-on-PCB, gold-box packaging, and CoC in fixture[1]
Accurate?

Performance2

accuracy
1 micron level[1]
Accurate?
Accuracy
1 micron[1]
Accurate?

Configuration & options8

machine type
flip-chip die bonder[1]
Accurate?
application focus
high volume manufacturing[1]
Accurate?
platform lineage
developed from the MRSI-HVM platform[1]
Accurate?
process choices
eutectic, epoxy stamping, UV epoxy dispensing, and in-situ UV curing[1]
Accurate?
Process choices
eutectic, epoxy stamping, UV epoxy dispensing, in-situ UV curing[1]
Accurate?
Configurations
conveyor version, heated head version[1]
Accurate?
Type
Flip-chip die bonder[1]
Accurate?
Heated head version features
Heated head on right side; localized top heating at fixed temperature or pulsed heating for eutectic bonding without reflowing neighboring solder pads[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
MRSI-HVM1 with conveyor——Equipped with an inline conveyor for single fixture or multiple cassette inputs that can automatically transport large forms of carriers of the dies.web.archive.org[1]
MRSI-HVM1 heated head version——Includes a heated head on the right side while the left side has the same head as a typical MRSI-HVM1; localized top heating at a fixed temperature or with pulsed heating is described for eutectic bonding of multiple dies onto a common carrier.web.archive.org[1]
Heated head version——Includes a heated head on the right side while the left side has the same head as a typical MRSI-HVM1.web.archive.org[1]
MRSI-HVM1 with heated head——Includes a heated head on the right side while the left side has the same head as a typical MRSI-HVM1, providing localized top heating at a fixed temperature or with pulsed heating for eutectic bonding of multiple dies onto a common carrier without reflowing neighboring solder pads.web.archive.org[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the accuracy of the MRSI-HVM1?

The MRSI-HVM1 achieves 1 micron accuracy.[1]

What process types does the MRSI-HVM1 support?

The MRSI-HVM1 supports eutectic die bonding, epoxy stamping, UV epoxy dispensing, and in-situ UV curing.[1]

What is the conveyor version of the MRSI-HVM1 used for?

The conveyor version uses an inline conveyor to transport carriers for active optical cable or similar chip-on-PCB applications, gold-box packaging, and chip-on-carrier in fixture.[1]

What is the purpose of the heated head version of the MRSI-HVM1?

The heated head version provides localized top heating at a fixed temperature or with pulsed heating for eutectic bonding of multiple dies onto a common carrier without reflowing neighboring solder pads.[1]

From which platform was the MRSI-HVM1 developed?

The MRSI-HVM1 was developed from the MRSI-HVM platform.[1]

Not publicly documented

The following facts about the HVM1 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HVM1 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the HVM1 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the HVM1 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the HVM1 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the HVM1 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]Sensors — web.archive.orgweb.archive.org
  3. [3]MRSI Systems World Class Customer Support – Jack Inocencio — web.archive.orgweb.archive.org
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Last updated Oct 5, 2026.

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