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KLA

Puma 9120 Defect

Metrology & InspectionKLA Puma 9120 family
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The KLA Puma 9120 Defect is a dark-field defect inspection system used for detecting defects on semiconductor wafers. The KLA Puma 9120 Defect supports 200 mm and 300 mm wafers and uses visible and UV light (370-720 nm) with pixel sizes down to 0.16 μm.[1][2]

KLAPuma 9120 Defect
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What it is

The KLA Puma 9120 Defect is a dark field defect detection tool. The model is configured for eight inch and twelve inch wafers. The model uses a dual open cassette loader. The model has two cameras and three inspection pixel models.[3][1][4][5]

How it works

The KLA Puma 9120 Defect uses User Interface Software Version 9.3.309.2.8 and Windows 2000.[3][2][5]

Where it fits in the process flow

The KLA Puma 9120 Defect handles eight inch and twelve inch wafers. The model is compatible with 200 mm and 300 mm wafer handling.[3][1][5]

Applications

The KLA Puma 9120 Defect is used for dark field defect inspection on semiconductor wafers. The model is applied to surface defect detection and inspection of array and random defect patterns.[1][2][5]

The KLA Puma 9120 Defect is configured with pixel sizes of 0.16 μm, 0.20 μm, 0.25 μm, 0.39 μm, and 0.62 μm. The model supports Array Mode Algorithm, Sizing, and 9.1 Simulator options, and the model is not RICO capable.[2][5][1]

What do the numbers mean?

Wafer handling5

Dual open Cassette 200/300mm loader[3]
Accurate?
Repeatability
≥90% (20 consecutive run on the same DSW wafer)[2]
Accurate?
Loader Type
Dual open cassette loader[1]
Accurate?
Wafer Sizes
200 mm (8 in), 300 mm (12 in)[1]2 sources
Accurate?
Wafer Sizes
8 inch; 12 inch[3]
Accurate?

Optics & imaging4

Wavelength Illumination
370~720 nm[2]
Accurate?
Wavelength Band
Visible, UV[2]
Accurate?
Cameras
2[1]
Accurate?
Number of Cameras
2[1]
Accurate?

Control & software8

User Interface Software Version 9.3.309.2.8[3]
Accurate?
User Interface Software Version
9.3.309.2.8[2]
Accurate?
Operating System
Windows 2000[2]
Accurate?
Software Options: Array Mode Algorithm
Yes[1]
Accurate?
Software Options: Sizing
Yes[1]
Accurate?
Software Options: 9.1 Simulator
Yes[1]
Accurate?
Software Options: RICO Capable
No[1]
Accurate?
With HDD & Software[2]
Accurate?

Configuration & options12

MS OS, Windows 2000[3]
Accurate?
Load Port Quantity
2[2]
Accurate?
Pixel Sizes
0.16μm, 0.20μm, 0.25μm, 0.39μm, 0.62μm[2]
Accurate?
Array Defect Capture Rate
≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[2]
Accurate?
Array False Defect Rate
≤1.5% (all sizes)[2]
Accurate?
Random Defect Capture Rate
≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[2]
Accurate?
Random False Defect Rate
≤1.5% (all sizes)[2]
Accurate?
Number of Inspection Pixel Models
3[1]
Accurate?
Pixel Sizes (sLXX) Installed or Available
sL5, sL8, sL20[1]
Accurate?
OEM
KLA[3]
Accurate?
Model
Puma 9120[3]
Accurate?
Category
Metrology & Inspection[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of inspection does the KLA Puma 9120 Defect perform?

The KLA Puma 9120 Defect is a dark field defect detection tool.[1]

Not publicly documented

The following facts about the Puma 9120 Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Puma 9120 Defect are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Puma 9120 Defect are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Puma 9120 Defect are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Puma 9120 Defect are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Puma 9120 Defect is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]conationtech.com — conationtech.comconationtech.com
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]KLA P-2 vs KLA Puma 9120 Defect | Waferpedia — waferpedia.comwaferpedia.com
  5. [5]KLA Puma 9120 Defect vs KLA Stereoscan 440 | Waferpedia — waferpedia.comwaferpedia.com
  6. [6]KLA-Tencor Puma 9120 — wotol.comwotol.com
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Last updated Oct 8, 2026.

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