Hitachi
WA 3300
The Hitachi WA 3300 is a metrology and inspection system. The Hitachi WA 3300 is a wide-area atomic force microscope. The Hitachi WA 3300 includes a 300 mm chuck.[1][2][3]
What it is
How it works
A metrology and inspection AFM uses a microscope body, a sensor assembly, a stage, control electronics, and data-processing electronics to collect and present surface information.[3][1]
The Hitachi WA 3300 includes an AFM sensor, a cantilever stage unit, an XYZ stage, an optical microscope with zoom and focus drive, a CCD camera, and a control unit with data processing hardware.[3][1]
Where it fits in the process flow
General reference — not yet source-verifiedA metrology and inspection AFM is used in wafer characterization and surface evaluation within semiconductor process control.
Applications
General reference — not yet source-verifiedA wide-area AFM is used to inspect surface topography, roughness, and local features on semiconductor wafers and similar precision surfaces.
What do the numbers mean?
Power & electrical1
- Control unit Power Supply Enclosure[3]
Wafer handling5
- 300 mm Chuck[3]
Optics & imaging6
Control & software6
Configuration & options19
- Wide Area AFM Main Body[3]
- AFM Unit:[3]
- AFM Sensor[3]
- Cantilever[3]
- Stage Unit and Accessories:[3]
- XYZ (3-axis) Stage[3]
- Anti-vibration Table[3]
- Drive (Zoom/ Focus)[3]
- Device Enclosure:[3]
- Enclosure[3]
- Filter unit[3]
Vintage & configurations
- 2007Vintage[3]
The unit is from 2007 vintage.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationControl unit Power Supply Enclosure[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the WA 3300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the WA 3300 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the WA 3300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the WA 3300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the WA 3300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the WA 3300 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]Hitachi WA 3300 family | Waferpedia — waferpedia.comwaferpedia.com
- [3]Equipment inventory listing
Last updated Oct 5, 2026.
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