Axcelis

NV GSD VHE

Ion Implantation Wafer tilt Axcelis NV GSD VHE family

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NV GSD VHE — Inventory photo — Fig. 01NV GSD VHEInventory photo^[1]

Wafer size

Wafer tilt

Power

90^[1]

Performance

Source extraction alignment jig^[1]

Gas delivery

SDS Gas box^[1]

Optics

Beamline column^[1]

What is it?

What do the numbers mean?

Power & electrical1

Max Extraction voltage (in KeV): 90^[1]

Wafer handling3

Wheel type: Full disk 17 wafers^[1]
Wafer size: Wafer tilt^[1]; Load and unload locks^[1]

Gas & chemistry4

Gases: Arsenic, Boron, Phosphine (SDS), all bottles removed. There is also present plumbing for one Xe bottle.^[1]; SDS Gas box^[1]; Gas box terminal^[1]
Gases: SF6, Argon^[2]

Optics & imaging1

Beamline column^[1]

Accurate?

Performance1

Source extraction alignment jig^[1]

Accurate?

Control & software1

Software version: 5.6^[2]

Configuration & options13

Source: Bernas^[1]
Extraction system: Triple axes^[1]
Max implantation energy (in KeV): 4.2 MeV (14 resonator configuration).^[1]; Heat Exchanger^[1]
Orienter type: flat^[1]
Hydrogen implantation available: no^[1]; AMU^[1]; Mechanical clamp^[1]
PFS: HD^[1]; Affinity Triple Chiller^[1]; Power distribution unit^[1]; Has gone through all major upgrades and updates^[2]; For High Current^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

GasesArsenic, Boron, Phosphine (SDS), all bottles removed. There is also present plumbing for one Xe bottle.^[1]
ConfigurationSDS Gas box^[1]
Max Extraction voltage (in KeV)90^[1]
ConfigurationGas box terminal^[1]
GasesSF6, Argon^[2]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the NV GSD VHE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV GSD VHE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NV GSD VHE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NV GSD VHE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NV GSD VHE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NV GSD VHE is not on record.
Answerable by: an OEM datasheet or a fab qualification report