Applied Materials
Endura CL
What it is
General reference — not yet source-verifiedThe Endura CL class of equipment is a wafer-fabrication deposition system used in semiconductor manufacturing.
The Endura CL is configured as a multi-chamber system in which individual process chambers perform dedicated functions.
How it works
General reference — not yet source-verifiedEndura CL equipment is a cluster-type platform that transfers wafers under vacuum between multiple process chambers.
The Endura CL equipment uses physical vapor deposition to deposit thin films of material onto a wafer.
Where it fits in the process flow
General reference — not yet source-verifiedIn a typical fabrication flow, the Endura CL deposition step often takes place after the wafer has been patterned and before subsequent deposition steps.
The Endura CL platform often connects to a coater, a cleaner, or other modules through a vacuum transport system.
Applications
General reference — not yet source-verifiedThe Endura CL deposition equipment is used to form thin films for interconnect layers in semiconductor devices.
The Endura CL is used for depositing metal films, commonly in back-end-of-line metallization.
What do the numbers mean?
Power & electrical6
Control & software1
Configuration & options25
- Preclean[3]
- ESIP TAN (No Target)[4]
- Degas STD[5]
- 4 wires[1]
- Chamber 1:[1]
- SIP-TA(N)[1]
- Chamber 2:[1]
- SIP-CU[1]
- Chamber 3:[1]
- Chamber 4:[1]
- process type None[1]
- Chamber C:[1]
- PCXT[1]
- Chamber D:[1]
- Ti[6]
Vintage & configurations
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Endura CL are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Endura CL are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Endura CL are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Endura CL are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Endura CL is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Endura CL are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (9)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]inventory listing
- [4]inventory listing
- [5]inventory listing
- [6]inventory listing
- [7]Equipment inventory listing
- [8]Equipment inventory listing
- [9]Equipment inventory listing
Last updated Sep 27, 2026.
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