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Applied Materials

Endura 300

DepositionApplied Materials Endura 300 family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Applied Materials Endura 300 is a PVD (Physical Vapor Deposition) system. The Endura 300 is configured for 300mm wafers. The Endura 300 platform can be used for processes such as magnetron sputtering of Ni2P thin films.[1][2][3]

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What it is

The Applied Materials Endura 300 is a physical vapor deposition (PVD) system designed for semiconductor manufacturing.[1][2]

How it works

The Endura 300 platform can include a magnetron sputtering chamber using radio frequency physical vapor deposition (RF-PVD).[3]

The system allows control of process parameters such as deposition pressure, radio frequency and direct current power, and target-to-wafer spacing.[3]

Where it fits in the process flow

In a typical process flow, the Endura 300 may be used to deposit metal layers such as aluminum, nickel alloys, or other materials required for interconnects, contacts, or photonic device layers.[3][4]

Applications

The platform has been applied in the development of nickel-based contact layers for III-V materials on silicon photonics devices, specifically for sputtering nickel phosphide (Ni2P) films.[3]

What do the numbers mean?

Wafer handling1

Wafer Size
300mm[3]2 sources
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Configuration & options1

Type
PVD (Physical Vapor Deposition)[2]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the Endura 300 support?

The Endura 300 is configured to process 300 millimeter wafers.[1][2]

What type of deposition process does the Endura 300 use?

The Endura 300 is a physical vapor deposition (PVD) system; it can include a magnetron sputtering chamber using radio frequency physical vapor deposition (RF-PVD).[1][2][3]

What materials have been deposited using the Endura 300 platform?

The Endura 300 platform has been used to develop nickel phosphide (Ni2P) thin films for contact layers on III-V materials for silicon photonics, and is also configured for aluminum interconnect deposition.[3][4]

Not publicly documented

The following facts about the Endura 300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the Endura 300 are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Endura 300 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Endura 300 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Endura 300 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Endura 300 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]macquarie.com — macquarie.commacquarie.com
  3. [3]ieeexplore.ieee.org — ieeexplore.ieee.orgieeexplore.ieee.org
  4. [4]Endura 300 Aluminum Interconnect — Applied Materials | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Sep 26, 2026.

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