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Applied Materials

Endura

DepositionApplied Materials Endura family
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Endura — Inventory photo
Fig. 01EnduraInventory photo[1]
  • Plate 01#Amat endura II xp robot overhaul exchange repair applied material pvd buffer robot 300mm pvd

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  • Plate 02Applied Materials Endura

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What it is

General reference — not yet source-verified

The Applied Materials Endura is a physical vapor deposition tool used in semiconductor manufacturing.

How it works

General reference — not yet source-verified

A physical vapor deposition system forms thin films by moving material from a source to a wafer in a controlled vacuum environment.

A deposition chamber is the process enclosure in which the wafer receives the deposited film.

Where it fits in the process flow

General reference — not yet source-verified

Deposition sits in the front-end or back-end thin-film process flow, after wafer preparation and before later patterning or integration steps that use the deposited layer.

A PVD tool adds conductive or barrier films that become part of the device stack before subsequent lithography, etch, or planarization operations.

What do the numbers mean?

Power & electrical2

RF Generator / Supply Rack[2]
Accurate?
Product details
8" - Gold and TiW Chambers - AC Rack - RF Generator / Supply Rack - VME Rack[2]
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Wafer handling3

Wafer size
6 inch[7]
Accurate?
Wafer size
8 inch[2]
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Wafer size
12 inch[1]
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Configuration & options27

Cu SIP[1]
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Part Numbers:[1]
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0010-04662[1]
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0040-48541[1]
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0040-03982[1]
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Gold and TiW Chambers[2]
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AC Rack[2]
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VME Rack[2]
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Nickle Chamber[6]
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Deposition
Directional eSIP TaN (barrier/seed)[5]
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Capability
Sputters into contacts & vias[5]
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Chambers
eSIP TaN .Tin - Multiple Degas[5]
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Process type
Physical Vapor Deposition (PVD)[1]
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Chamber material
Copper (Cu)[1]
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Chamber material
Gold and Titanium Tungsten (TiW)[2]
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Chamber material
Nickel (Ni)[6]
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Vintage year
1995[7]
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Vintage year
1996[8]
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OEM
Applied Materials[1]
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Model
Endura[1]
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Equipment type
PVD Chamber (Physical Vapor Deposition)[1]
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Product details
12" - Cu SIP - Part Numbers: 0010-04662, 0040-48541, 0040-03982[1]
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Equipment type
PVD (Physical Vapor Deposition)[2]
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Equipment type
Chamber[6]
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Product details
Nickle Chamber[6]
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Vintage
1996 Vintage[8]
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Vintage
1995 Vintage[7]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationRF Generator / Supply Rack[2]
  • Product details8" - Gold and TiW Chambers - AC Rack - RF Generator / Supply Rack - VME Rack[2]

Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

  • Applied Materials Endura Power SupplyIn Productionsource[9]
  • Applied Materials P/N: 0010-70254 Endura Heater Assembly0010-70254In Productionsource[10]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Applied Materials Endura?

It is a physical vapor deposition tool used for semiconductor thin-film deposition.[1][2][8][7]

Not publicly documented

The following facts about the Endura are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Endura are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Endura are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Endura are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Endura are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Endura is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (12)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]inventory listing
  7. [7]Equipment inventory listing
  8. [8]Equipment inventory listing
  9. [9]Equipment inventory listing
  10. [10]Equipment inventory listing
  11. [11]Fab.nano Equipment Rates START.nano March 2026 0 — nanousers.mit.edunanousers.mit.edu
  12. [12]Applied Materials Inc. - 2009 Semiconductor — appliedmaterials.com (Jan 8, 2010)web.archive.org
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Last updated Oct 7, 2026.

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