Waferpedia

Applied Materials

DPS II CIP

EtchApplied Materials DPS family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

DPS II CIP — Inventory photo
Fig. 01DPS II CIPInventory photo[1]

Vacuum

Scrubber, Dry Pump[1]

Gas delivery

12 Gas line (Standard Gas Line)[1]

What is it?

The Applied Materials DPS II CIP is an etcher.

What do the numbers mean?

Vacuum & pumping2

Not applicable
Scrubber, Dry Pump[1]
Accurate?
Dry pump
Not applicable[1]
Accurate?

Gas & chemistry2

4x (D4) SILICON DPS II chamber, 12 Gas line (Standard Gas Line)[1]
Accurate?
Gas line
12 Gas line (Standard Gas Line)[1]
Accurate?

Configuration & options9

Applicable
2 Chiller[1]
Accurate?
OEM
Applied Materials[1]
Accurate?
Model
DPS II CIP[1]
Accurate?
Category
Etch[2]
Accurate?
Tool type
Etcher[2]
Accurate?
Chamber
4x (D4) SILICON DPS II chamber[1]
Accurate?
Chiller
2 Chiller applicable[1]
Accurate?
Scrubber
Not applicable[1]
Accurate?
Vintage
2005[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration4x (D4) SILICON DPS II chamber, 12 Gas line (Standard Gas Line)[1]
  • Not applicableScrubber, Dry Pump[1]
  • Gas line12 Gas line (Standard Gas Line)[1]
  • Dry pumpNot applicable[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

Who is the manufacturer of the DPS II CIP?

Applied Materials.[1]

Not publicly documented

The following facts about the DPS II CIP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DPS II CIP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DPS II CIP are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DPS II CIP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DPS II CIP are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DPS II CIP is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.comwaferpedia.com
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Last updated Oct 3, 2026.

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