Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Applied Materials DPS II CIP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | DPS II CIPApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Applied Materials DPS |
| Specifications | ||
| OEM | Applied Materials[1] | Applied Materials[3] |
| Model | 0010-16392[1] | DPS II CIP[3] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | 4x (D4) SILICON DPS II chamber, 12 Gas line (Standard Gas Line)[3] |
| Applicable | — | 2 Chiller[3] |
| Not applicable | — | Scrubber, Dry Pump[3] |
| Category | — | Etch[4] |
| Tool type | — | Etcher[4] |
| Chamber | — | 4x (D4) SILICON DPS II chamber[3] |
| Gas line | — | 12 Gas line (Standard Gas Line)[3] |
| Chiller | — | 2 Chiller applicable[3] |
| Scrubber | — | Not applicable[3] |
| Dry pump | — | Not applicable[3] |
| Vintage | — | 2005[3] |
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