Zygo

Newview 7300 Optical

Metrology & Inspection Zygo Newview 7300 family

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Newview 7300 Optical — Inventory photo — Fig. 01Newview 7300 OpticalInventory photo^[1]

Power

3.0 GB DDR2 Non-ECC SDRAM, 667 MHz^[1]

Performance

≤ 0.75%^[4]

Optics

1X, 5X Objectives^[1]

What it is

The Zygo Newview 7300 Optical is a metrology and inspection instrument.^[5]^[6]

The Zygo NewView 7300 Optical is a white light interferometer and optical profilometer.^[6]^[4]

The Zygo Newview 7300 Optical uses 1X and 5X objectives in one configuration and 5X and 50X objectives in another configuration.^[1]^[2]

How it works

The NewView 7300 uses non-contact, three-dimensional, scanning white light interferometry with a closed-loop piezo-based scanner and capacitive sensors.^[4]

The NewView 7300 uses ZYGO's Coherence Scanning Interferometry technology for three-dimensional optical surface measurement.^[6]

The NewView 7300 includes motorized image zoom, motorized focus, and motorized stage options in some configurations.^[4]^[2]

Where it fits in the process flow

The NewView 7300 is used as a nondestructive surface measurement tool for characterizing topography without sample preparation.^[6]

The NewView 7300 measures surfaces that include opaque, transparent, coated, uncoated, specular, and nonspecular parts.^[4]

Applications

The NewView 7300 is used for step height measurements, surface roughness measurements, and three-dimensional mapping of surfaces.^[6]

The NewView 7300 is used to characterize and quantify surface roughness, step heights, critical dimensions, and other topographical features.^[6]

Why won't it start?

Documented failure modes, common issues, and field considerations.

The Zygo NewView 7300 Optical has been replaced with a new WLI tool.

What do the numbers mean?

Power & electrical3

Dell Core 2 Duo 3.0 GHz OptiPlex 755 minitower (tool-less chassis, 1333 MHz FSB, 4 MB cache)^[1]; 3.0 GB DDR2 Non-ECC SDRAM, 667 MHz^[1]
input voltage: 100 to 240 VAC, 50/60 Hz^[4]

Vacuum & pumping1

compressed air: 60 to 80 psi; dry and filtered source; 1/4 in. input^[4]

Optics & imaging15

1X, 5X Objectives^[1]; High-speed digital 640 × 480 high-resolution CCD camera^[1]; High-output, long-life white light LED light source and aperture stop for improved illumination^[1]; Dell USB keyboard & optical mouse^[1]; 5x and 50x objectives – no turret^[2]
objectives: 1X, 2.5X, 5X, 10X, 20X, 50X, 100X^[4]
objective mounting options: Single objective dovetail; manual 6-position turret; motorized 6-position turret^[4]
illuminator: Single white-light LED design^[4]
z-drive: DC brushless microstepper motor with ballscrew drive, 4 in. range, 0.1 μm resolution^[4]
vertical resolution: < 0.1 nm^[4]
lateral resolution: 0.36 to 9.5 μm^[4]
rms repeatability: < 0.01 nm^[4]
stated objectives in inventory listing: 1X, 5X objectives^[1]
stated camera in inventory listing: 640 × 480 high-resolution CCD camera^[1]
stated objectives in inventory listing: 5x and 50x objectives; no turret^[2]

Performance2

step height accuracy: ≤ 0.75%^[4]
repeatability: ≤ 0.1% @ 1σ^[4]

Control & software6

MetroPro software, Windows XP, and computer (specs below)^[1]; MetroPro 8.3.5 on Dell Windows XP computer^[2]
computer: High-performance Dell PC with LCD monitor^[4]
software: ZYGO MetroPro software running under Microsoft Windows XP^[4]
stated software and computer in inventory listing: MetroPro software, Windows XP, and computer^[1]
stated software in inventory listing: MetroPro 8.3.5 on Dell Windows XP computer^[2]

Dimensions & facilities1

measurement technique: Non-contact, three-dimensional, scanning white light interferometry^[4]

Configuration & options30

High-performance closed-loop piezo scanning transducer with capacitive feedback, 150 µm scan length, and high-speed measurement and analysis module^[1]; Minimum scan speed of 14 µm/sec with additional high-speed and sub-Nyquist scan modes up to 135 µm/sec^[1]; Automated, motorized 3-position image zoom^[1]; Field stop for focusing aid^[1]; Integrated 75 mm head riser^[1]; 250 GB SATA hard drive (3.0 Gb/s)^[1]; 48X/32X/48X CD-RW/DVD combo drive^[1]; Dell 1908FP black flat panel SVGA display, 19" viewable^[1]; DVI (Digital) graphics adapter card^[1]; Integrated gigabit network card and AC97 audio^[1]; Motorized 3-axis stages, XY and Z^[2]
scanner: Closed-loop piezo-based, with highly linear capacitive sensors^[4]
field zoom lenses: 0.5X, 0.75X, 1.0X, 1.5X, 2.0X^[4]
image zoom: Motorized 3-position system zoom^[4]
field of view: 0.03 to 14 mm; larger area imaged with field stitching^[4]
measurement array: Selectable 640x480, 320x240, 160x120; optional 992 x 992 (1K)^[4]
focus: Motorized manual and auto focus^[4]
vertical scan range: 150 μm^[4]
extended scan range: 20 mm^[4]
data scan rate: ≤135 μm/sec^[4]
maximum data points: 307,200; 984,064 optional^[4]
test part characteristics: Opaque, transparent, coated, uncoated, specular, and nonspecular surfaces^[4]
maximum sample size: 3.5 x 8 x 8 in. (89 x 203 x 203 mm); larger sample sizes possible^[4]
reflectivity: 1-100%^[4]
temperature: 15 to 30°C^[4]
humidity: 5 to 95% relative, noncondensing^[4]
stated scan length in inventory listing: 150 µm scan length^[1]
stated image zoom in inventory listing: Automated, motorized 3-position image zoom^[1]
stated light source in inventory listing: High-output, long-life white light LED light source^[1]
stated stage in inventory listing: Motorized 3-axis stages, XY and Z^[2]

Vintage & configurations

2012Vintage^[1]
One source describes the equipment as 2012 vintage.

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationDell Core 2 Duo 3.0 GHz OptiPlex 755 minitower (tool-less chassis, 1333 MHz FSB, 4 MB cache)^[1]
Configuration3.0 GB DDR2 Non-ECC SDRAM, 667 MHz^[1]
input voltage100 to 240 VAC, 50/60 Hz^[4]
compressed air60 to 80 psi; dry and filtered source; 1/4 in. input^[4]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Newview 7300 Optical are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented variants, configuration options, or revision breakpoints of the Newview 7300 Optical are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Newview 7300 Optical are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Newview 7300 Optical is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Newview 7300 Optical are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the Newview 7300 Optical are on record.
Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (6)Every fact above is drawn from these public sources

[1]Equipment inventory listing
[2]Inventory photo
[3]Inventory photo
[4]lambdaphoto.co.uk — lambdaphoto.co.uklambdaphoto.co.uk
[5]Newview 7300 Optical — Zygo | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
[6]Zygo NewView 7300 Optical Profilometer - The Singh Center for Nanotechnology Wiki — wiki.nano.upenn.eduwiki.nano.upenn.edu