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Zeiss

Leo 1525

Metrology & InspectionZeiss Leo 1525 family
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The Zeiss Leo 1525 is a scanning electron microscope used in metrology and inspection contexts. The Zeiss Leo 1525 is a high resolution FE-SEM. The Zeiss Leo 1525 operates at accelerating voltages from 0.5 kV to 20 kV.[1][2]

Leo 1525 — Inventory photo
Fig. 01Leo 1525Inventory photo[3]

Power

0.5 kV to 20 kV[2]

Optics

High resolution FE-SEM[2]

What it is

The Zeiss Leo 1525 is a scanning electron microscope used in metrology and inspection contexts.[3][1]

The Leo 1525 is a ZEISS LEO microscope with a Gemini column architecture.[4][2]

How it works

The Leo 1525 uses a field emission gun and a Gemini objective lens design.[2]

Applications

The Leo 1525 is used for high-resolution imaging.[2]

The Leo 1525 is used for topographic imaging, surface-specific imaging, and compositional microanalysis through energy-dispersive X-ray analysis.[2]

The Leo 1525 is used for challenging samples such as magnetic materials.[2]

What do the numbers mean?

Power & electrical2

Accelerating voltages
0.5 kV to 20 kV[2]
Accurate?
Pattern generator
RAITH ELPHY Plus[2]
Accurate?

Optics & imaging10

Description
High resolution FE-SEM[2]
Accurate?
Column technology
Gemini[2]
Accurate?
Resolution at 20 kV
1.5 nm[2]
Accurate?
Resolution at 1 kV
3.5 nm[2]
Accurate?
Detectors
In-lens, secondary electrons, EDX[2]
Accurate?
EDX energy resolution
123.8 eV (calibrated Mn Kalpha)[2]
Accurate?
EBL ultimate resolution
20 nm[2]
Accurate?
Secondary electron detector
Everhardt-Thornley[2]
Accurate?
Gemini objective lens design
Combines electrostatic and magnetic fields[2]
Accurate?
In-lens detection concept
Detects secondary and backscattered electrons in parallel[2]
Accurate?

Configuration & options6

Instrument type
Scanning Electron Microscope (SEM)[1]
Accurate?
Stage XY range
10 cm[2]
Accurate?
EBL maximum writefield
5×5 mm[2]
Accurate?
Field emission gun
Present[2]
Accurate?
Beam stability
Better than 0.5% per hour[2]
Accurate?
Category
Metrology & Inspection[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Accelerating voltages0.5 kV to 20 kV[2]
  • Pattern generatorRAITH ELPHY Plus[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the typical resolution of a field-emission SEM like this class?General reference — not yet source-verified

Field-emission SEMs in this class offer high spatial resolution, capable of resolving features down to the nanometer range, depending on the specific electron optics and operating conditions.

What types of samples can be imaged with this kind of instrument?General reference — not yet source-verified

Most SEMs require conductive samples or samples that have been coated with a thin conductive layer to prevent charging. Non-conductive materials such as polymers, ceramics, or biological specimens can be imaged after sputter coating with gold, platinum, or carbon.

What are the main maintenance considerations for such a system?General reference — not yet source-verified

Key maintenance includes regular vacuum system checks, electron source conditioning, column alignment, and detector cleaning. Contamination from sample outgassing or long-term operation can affect image quality, so periodic preventative maintenance is recommended.

Can this class of SEM be used for automated metrology in a production environment?General reference — not yet source-verified

Yes, many SEMs in this class can be equipped with automated stage control, pattern recognition, and measurement software to perform repetitive critical dimension or defect review tasks in a semi-automated or fully automated mode.

What is the typical working distance for high-resolution imaging?General reference — not yet source-verified

Working distance and other operating parameters are adjustable. For high-resolution imaging, a short working distance (a few millimeters) is typically used, but the optimal setting depends on the specific application and sample geometry.

Not publicly documented

The following facts about the Leo 1525 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Leo 1525 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Leo 1525 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Leo 1525 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Leo 1525 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Leo 1525 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]polifab.polimi.it — polifab.polimi.itpolifab.polimi.it
  3. [3]Inventory photo
  4. [4]Leo 1525 | NNCI — nnci.netnnci.net
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Last updated Oct 4, 2026.

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