Waferpedia

Veeco

XLD

Metrology & InspectionVeeco XLD family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Veeco XLD is an atomic force microscope (AFM) used for semiconductor metrology and inspection. The Veeco XLD supports 300 mm (12 inch) wafers.[1]

Veeco logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What is it?

The Veeco XLD is an atomic force microscope (AFM) used for metrology and inspection, supporting 300 mm (12 inch) wafers.

What do the numbers mean?

Wafer handling1

Wafer Size
300 mm (12 inch)[1]
Accurate?

Configuration & options1

Tool Type
Atomic force microscope (AFM)[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the XLD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the XLD are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XLD are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the XLD are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the XLD are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the XLD are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
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Last updated Sep 28, 2026.

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