Tokyo Electron
P 12 XL
What it is
How it works
General reference — not yet source-verifiedA wafer prober positions a wafer on a probe station and brings electrical probes into contact with device pads for test measurements.
A prober in this class supports electrical characterization at wafer level before singulation.
Where it fits in the process flow
General reference — not yet source-verifiedThe P 12 XL belongs in wafer-level test and probe flow.
The P 12 XL is used after wafer fabrication steps that create contactable structures and before downstream wafer sorting or assembly steps.
Applications
General reference — not yet source-verifiedThe P 12 XL is used for semiconductor wafer testing.
What do the numbers mean?
Power & electrical2
- 50/60 Hz[2]
Wafer handling4
- Missing Loader Control Box (1)[3]
Configuration & options11
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Electroglas EG 4090 Automatic Wafer— Same function class: Test & Probe, nullCompare in depthsource[6]
- Accretech UF 3000 EX— Same function class: Test & Probe, nullCompare in depthsource[6]
- Accretech UF 300— Same function class: Test & Probe, nullCompare in depthsource[6]
- Accretech UF 3000 EX Automatic Wafer— Same function class: Test & Probe, nullCompare in depthsource[6]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the P 12 XL are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 12 XL are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the P 12 XL are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the P 12 XL are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the P 12 XL are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the P 12 XL is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (9)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]inventory listing
- [4]Equipment inventory listing
- [5]Equipment inventory listing
- [6]Prober Management Software | Tokyo Electron — tel.com (Dec 10, 2007)web.archive.org
- [7]Equipment inventory listing
- [8]Equipment inventory listing
- [9]Equipment inventory listing
Last updated Oct 6, 2026.
Compare with similar tools
View all →
The Electroglas EG 4090 is an automatic wafer prober designed for high-precision wafer-level electrical testing.
The Accretech UF 300 is a Test & Probe wafer prober with 8-inch and 12-inch wafer sizes and GPIB interface support.
The Accretech / TSK UF 3000 EX is a prober used in semiconductor test and probe applications.
