Comparison ledger
KLA 1007, Tokyo Electron P 12 XL, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | P 12 XLTokyo Electron |
|---|---|---|
| OEM | KLA | Tokyo Electron |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Tokyo Electron P 12 |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 1007[1] | P 12 XL[3] |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | — |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | Prober[3] |
| Process | — | PPF[3] |
| Configuration | — | Tri-Temp[3] |
| Phase | — | 1 Phase[4] |
| Voltage | — | 208 V[4] |
| Wafer Size | — | 12 inch[6] |
| Tri-Temp | — | Tri-Temp 2002 (10), 2003 (3), 2004, 2005 Vintage[3] |
| OEM | — | Tokyo Electron[3] |
| Wafer sizes | — | 12 inch[3] |
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