Thermo Fisher
Scientific FEI Quanta 3 D FEG FIB-SEM
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Thermo Fisher Scientific FEI Quanta 3 D FEG is a focused ion beam - scanning electron microscope (FIB-SEM) system. The system operates at 210-240 V, 50/60 Hz, and draws 15 A.[1][2]
How it works
General reference — not yet source-verifiedThe electron beam provides non-destructive imaging, while the ion beam enables cross-sectioning, lamella preparation for transmission electron microscopy, and localized sputtering. The system can switch between beams or operate them simultaneously under computer control.
Where it fits in the process flow
General reference — not yet source-verifiedFIB-SEM systems are used in semiconductor fabrication and metrology as a tool for in-line defect analysis, failure analysis, and process development. The system sits after inspection steps where defects are identified, and before high-resolution analysis such as TEM, where the FIB prepares thin lamellae from specific locations.
What do the numbers mean?
Power & electrical5
Configuration & options3
- 15 A[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Scientific FEI Quanta 3 D FEG FIB-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Scientific FEI Quanta 3 D FEG FIB-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Scientific FEI Quanta 3 D FEG FIB-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Scientific FEI Quanta 3 D FEG FIB-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Scientific FEI Quanta 3 D FEG FIB-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Scientific FEI Quanta 3 D FEG FIB-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
Compare with similar tools
View all →The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
