Tegal
6540
The Tegal 6540 is a high-density CCP plasma etch tool. The Tegal 6540 features dual-frequency RF power application and magnetic plasma confinement. The Tegal 6540 is optimized for device design rules down to 90nm.[1]
What it is
How it works
Where it fits in the process flow
Applications
The Tegal 6540 was used for MEMS fabrication.[2]
The Tegal 6540 was used for etching platinum and iridium electrode and capacitor structures, ferroelectric materials, high-k dielectric materials, and gold interconnects.[2][3][1]
The Tegal 6540 was also used for non-volatile ferroelectric random access memory device manufacturing and for high-k decoupling capacitor production.[2][3][1]
The Tegal 6540 was optimized for device design rules down to 0.13 micron and later to 90nm.[2][1]
- MEMS fabrication
- removing hard-to-etch materials
- high-K decoupling capacitors
- cell phones
- other wireless devices
- noble metal electrodes and capacitor structures
- ferroelectric materials
- high-K dielectric materials
- compound semiconductor materials
- interconnect materials
- DRAM devices
- embedded memory devices
- FeRAM device manufacturing
What do the numbers mean?
Power & electrical2
- Plasma technology
- dual-frequency RF power technology / dual-frequency RF power application[2]
Wafer handling1
Configuration & options9
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 6540 HRe | — | — | Same 6540 line name used for a version described as a high-density CCP plasma etch tool with dual-frequency RF power application and magnetic plasma confinement; wafer size stated as 100mm–200mm and optimized down to 90nm. | web.archive.org[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
How does the machine control etch rate and selectivity?General reference — not yet source-verified
Etch rate and selectivity are controlled by adjusting process parameters such as gas composition, pressure, power, and temperature. The balance between chemical and physical etching components determines the material removal rate and the ability to stop on underlying layers.
What is the typical maintenance requirement for such a system?General reference — not yet source-verified
Routine maintenance includes cleaning the chamber to remove etch byproducts, replacing worn components like electrodes and focus rings, and calibrating gas flow controllers and pressure sensors. The chamber may also require periodic conditioning to ensure process stability.
Can this machine handle high-volume manufacturing?General reference — not yet source-verified
Machines in this class are generally designed for production environments, offering automated wafer handling and process control. Throughput depends on the specific process recipe and chamber design, but they can be integrated into automated manufacturing lines.
Not publicly documented
The following facts about the 6540 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 6540 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 6540 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 6540 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No publicly documented compatible parts, consumables, or accessories for the 6540 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 6540 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
Last updated Oct 5, 2026.
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