SUSS MicroTec
SD12
The SUSS MicroTec SD12 is a manual system for wafers up to 300 mm. The SD12 supports solvent processes, puddle and spray developing, lift-off, and wafer cleaning.[1]
What it is
The SUSS MicroTec SD12 is a manual coating and developing system. The SD12 is designed for wafers up to a diameter of 300 mm. The SD12 is part of the SUSS MicroTec coating and developing equipment portfolio. The SD12 supports solvent-based processes such as puddle developing, spray developing, lift-off, and wafer cleaning.[1]
How it works
The SD12 is a manual system that processes wafers through spin-based coating and developing steps. The system handles single wafers in a batch-less, operator-controlled process flow. The SD12 applies process liquids, such as developers or cleaning solvents, onto the wafer surface while it is spun to achieve uniform coverage. The system supports a range of solvent-based processes, including puddle developing and spray developing.[1]
What can it run?
Process applications and technology nodes documented for this tool.
- Coating
- Developing
- Lift-off
- Wafer Cleaning
What do the numbers mean?
Wafer handling2
Configuration & options2
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the maximum wafer diameter the SD12 can handle?
The SD12 is a manual system that can handle wafers up to 300 mm in diameter.[1]
What types of processes does the SD12 support?
The SD12 supports solvent processes including puddle developing, spray developing, lift-off, and wafer cleaning.[1]
Is the SD12 an automated or manual system?
The SD12 is a manual system, as opposed to automated coating and developing systems.[1]
Not publicly documented
The following facts about the SD12 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SD12 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SD12 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SD12 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SD12 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SD12 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]hilpert.ch — hilpert.chhilpert.ch
Last updated Sep 22, 2026.