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SUSS MicroTec

RCD8

SUSS MicroTec RCD8 family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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  • Plate 01Step-by-step guide to operate SUSS Microtec's RCD8 Developer

    SUSSWatch on YouTube
  • Plate 02SUSS RCD8

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What it is

The RCD8 is a member of the coating and developing product family from SUSS MicroTec.[1]

Where it fits in the process flow

Photomask processing is one application area for the RCD8.[1]

Applications

The RCD8 is used for coating and developing photoresist in photomask manufacturing and other semiconductor processes.[1]

  • Coating and developing processes in semiconductor manufacturing

What do the numbers mean?

Configuration & options1

Product category
Coating & Developing[1]
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What replaced it?

  • siblingSUSS MicroTec MCS8— Listed in the same Coating & Developing portfolio category on the SUSS product overview pagesource[1]
  • siblingSUSS MicroTec HP8— Listed in the same Coating & Developing portfolio category on the SUSS product overview pagesource[1]
  • siblingSUSS MicroTec ECD8— Listed in the same Coating & Developing portfolio category on the SUSS product overview pagesource[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What kind of system is the SUSS MicroTec RCD8?

The RCD8 is a spin-coating and developing system for semiconductor manufacturing.[1]

Is the RCD8 designed for photomask processing?

Yes, photomask processing is one application area for the RCD8.[1]

Not publicly documented

The following facts about the RCD8 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the RCD8 are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RCD8 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the RCD8 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the RCD8 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the RCD8 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]suss.com — suss.comsuss.com
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Last updated Sep 29, 2026.

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