SUSS MicroTec
MA 150 E Mask
Wafer size
Wafer Thickness Measurement
Power
1000 Watt Lamphouse[4]
Vacuum
Configured to fit customer requirements[4]
Performance
Topside Alignment (TSA)[4]
Optics
Automatic Mask Aligner[4]
What it is
The MA 150 E is an automatic mask aligner with cassette-to-cassette operation and topside alignment capability. The MA 150 E is equipped with the AL3000 automatic alignment system and Cognex 8100 pattern recognition software for automatic mask-to-substrate alignment, achieving alignment accuracies of less than 1.0 µm. The MA 150 E supports 6-inch wafers. The exposure system includes a 1000-watt lamp house and UV400 optics providing 365 nm and 405 nm exposure wavelengths. The MA 150 E can perform hard, soft, proximity, and vacuum contact exposure modes with appropriate tooling. The system operates on Windows 2000 and is powered by a CIC1200 power supply at 208/230 V. The MA 150 E uses a DVM6 microscope with a single objective available in 5×, 10×, or 20× magnification.[4][1]
How it works
The MA 150 E uses a 1000-watt lamp house and UV400 optics for exposures at 365 nm and 405 nm. A DVM6 microscope with configurable single objective is used for alignment viewing. The system includes an XRS prealigner and an auto-align option. The operating system is Windows 2000. The MA 150 E is powered by a CIC1200 power supply at 208/230 V.[4]
What do the numbers mean?
Power & electrical3
Vacuum & pumping3
- Capable of Hard, Soft, Proximity, and Vacuum Contact Exposure Modes (with appropriate tooling)[4]
Wafer handling8
Optics & imaging5
- Automatic Mask Aligner[4]
Performance5
Control & software2
Configuration & options13
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Lamphouse1000 Watt Lamphouse[4]
- Power SupplyCIC1200[4]
- Vacuum ChuckConfigured to fit customer requirements[4]
- ConfigurationCapable of Hard, Soft, Proximity, and Vacuum Contact Exposure Modes (with appropriate tooling)[4]
- Exposure modesHard, Soft, Proximity, and Vacuum Contact Exposure Modes[4]
- System power208/230V[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What exposure modes are available on the MA 150 E?
The MA 150 E is capable of hard, soft, proximity, and vacuum contact exposure modes with appropriate tooling.[4]
What alignment accuracy does the MA 150 E achieve?
The MA 150 E achieves alignment accuracies of less than 1.0 µm.[4]
What lamp and optics does the MA 150 E use?
The MA 150 E uses a 1000-watt lamp house and UV400 optics providing 365 nm and 405 nm exposure wavelengths.[4]
What operating system does the MA 150 E use?
The MA 150 E operates on Windows 2000.[4]
Not publicly documented
The following facts about the MA 150 E Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA 150 E Mask are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MA 150 E Mask are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MA 150 E Mask are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MA 150 E Mask are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MA 150 E Mask is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]inventory listing
Last updated Oct 2, 2026.
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