SUSS MicroTec
AS 8
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The SUSS AS8 (also AS 8) is a manual spray coater for high topographies, designed for R&D and low-volume production of substrates up to 200 mm.[1]
What it is
The SUSS MicroTec AS 8 is a manual spray coater designed for research and development and low-volume production of substrates up to 200 mm wafers and square substrates up to 6-inch edge length.[1]
How it works
The AS 8 features a high-precision X/Y stage with dual spray nozzles and a separate solvent nozzle. The z-axis adjustment range is up to 45 mm, and the nozzle adjustment ranges from 67.5 mm to 107.5 mm. Spray axis velocities reach up to 500 mm/s with acceleration up to 9 m/s². Chuck rotation speeds are up to 1,000 rpm, and a heated chuck option is available.[1]
What do the numbers mean?
Wafer handling6
Configuration & options5
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Not publicly documented
The following facts about the AS 8 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AS 8 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AS 8 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AS 8 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AS 8 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the AS 8 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]suss.com — suss.comsuss.com
- [2]Equipment inventory listing
Last updated Sep 22, 2026.