SPTS
MVD4500
The SPTS MVD4500 is a panel and large substrate deposition tool. The SPTS MVD4500 can handle multiple substrates up to 930 x 720 mm. The SPTS MVD4500 is capable of performing ALD and MVD on substrates in this size range.[1][2]
What it is
The SPTS MVD4500 is a deposition tool for molecular vapor deposition and atomic layer deposition.[1][2]
The SPTS MVD4500 is a panel and large substrate tool for batch processing.[1][2]
How it works
Where it fits in the process flow
Applications
The SPTS MVD4500 is used for hydrophobic antistiction films in MEMS devices.[1]
The SPTS MVD4500 is used for sensors, actuators, displays, RF switches, inkjets, and data storage devices.[1]
The SPTS MVD4500 is used in bioMEMS for wetting control in micro-fluidics, passivation on implantable devices, and functionalized surface coatings for genome sequencing and diagnostics.[1]
The SPTS MVD4500 is used in production applications requiring moisture barriers, anti-corrosion coatings, or release layers for imprinting.[1]
- MEMS hydrophobic antistiction films
- Sensors
- Actuators
- Displays
- RF switches
- Inkjets
- Data storage devices
- Wetting control in micro-fluidics
- Passivation on implantable devices
- Functionalized surface coatings for genome sequencing and diagnostics
- Moisture barriers
- Anti-corrosion coatings
- Release layers for imprinting
What do the numbers mean?
Wafer handling8
Gas & chemistry1
Performance1
Configuration & options6
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- PrecursorsUp to 4 precursors[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the MVD4500 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MVD4500 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MVD4500 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MVD4500 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MVD4500 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MVD4500 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]atomiclayerdeposition.com — atomiclayerdeposition.comatomiclayerdeposition.com
Last updated Oct 8, 2026.
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