Plasma-Therm
7300 PE (7000)
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Plasma-Therm 7300 PE (7000) is a plasma-enhanced chemical vapor deposition (PECVD) system. The system supports 8-inch wafers.[1]
How it works
General reference — not yet source-verifiedA PECVD reactor typically consists of a vacuum chamber with a gas distribution system, a substrate holder that can be heated or cooled, and a radio-frequency (RF) power source to generate a plasma. The precursor gases flow into the chamber and are dissociated in the plasma, creating reactive species that adsorb on the wafer and react to form the desired film. By-products are pumped away. The process parameters — RF power, pressure, gas flow rates, and substrate temperature — control film properties such as composition, thickness uniformity, and stress.
What do the numbers mean?
Wafer handling1
Gas & chemistry1
Vintage & configurations
- 1996Vintage year[1]
System vintage
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Process typePlasma-Enhanced Chemical Vapor Deposition (PECVD)[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 7300 PE (7000) are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the 7300 PE (7000) are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented variants, configuration options, or revision breakpoints of the 7300 PE (7000) are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 7300 PE (7000) are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 7300 PE (7000) are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 7300 PE (7000) is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]7300 PE (7000) — Plasma-Therm | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 30, 2026.
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