Pfeiffer
ACP040G
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Wafer size
100mm
Vacuum
Chamber primary pump[1]
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Pumping system for an evaporator chamber
What do the numbers mean?
Vacuum & pumping2
Configuration & options1
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the Pfeiffer ACP040G used for in this system?
It is the chamber primary pump.[1]
What kind of process does the evaporator support?
It is dedicated to coating conductive layers to prepare non-conductive samples for e-beam exposure and avoid charging issues.[1]
What wafer sizes are handled?
The system handles 100 mm wafers, thick 100 mm wafers using the shuttle for chips if thickness exceeds 700 µm, and 150 mm wafers.[1]
Not publicly documented
The following facts about the ACP040G are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ACP040G are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the ACP040G are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the ACP040G are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ACP040G are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ACP040G is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]epfl.ch — epfl.chepfl.ch
Last updated Sep 25, 2026.
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