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Onto Innovation

MetaPulse 200 Film Thickness Measurement

Metrology & InspectionProduced 1998–Onto Innovation MetaPulse 200 family
Research Quality: 40% complete

The MetaPulse 200 Film Thickness Measurement is a film thickness measurement system. The MetaPulse 200 Film Thickness Measurement is a tool for 8-inch wafers. The MetaPulse 200 Film Thickness Measurement is an opaque film metrology tool for multilayer metal film stacks.[1][2][3]

MetaPulse 200 Film Thickness Measurement — Inventory photo
Fig. 01MetaPulse 200 Film Thickness MeasurementInventory photo[1]

Produced

1998–

Power

220 VAC[2]

Optics

800 nm[4]

What it is

The MetaPulse 200 is an opaque film metrology system manufactured by Rudolph Technologies, later part of Onto Innovation. The system is designed for measuring film thickness on 200 mm (8-inch) wafers.[1][2][4][3]

How it works

The MetaPulse 200 employs picosecond ultrasonic laser sonar (PULSE Technology), a non-contact, non-destructive measurement technique based on laser-induced ultrasound. An ultrafast 800 nm laser generates acoustic pulses that propagate through the film stack; reflected echoes are detected to determine layer thicknesses and material properties.[4][3]

What do the numbers mean?

Power & electrical7

Voltage
220 VAC[2]
Accurate?
Single Phase[1]
Accurate?
50/60 Hz[1]
Accurate?
Maximum Single Load
5 amps at 220 VAC[2]
Accurate?
Phase
Single Phase[2]
Accurate?
Frequency
50/60 Hz[2]
Accurate?
Computer platform
266 MHz Pentium II Motherboard[4]
Accurate?

Wafer handling3

Wafer size
8 inch[1]
Accurate?
Wafer diameter
200 mm[4]
Accurate?
Process
Wafer Inspection[4]
Accurate?

Optics & imaging2

Ultrafast laser
800 nm[4]
Accurate?
Optical drive
CD ROM drive[4]
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Control & software2

Controller
Programmable motion controller[4]
Accurate?
Interface
GEM compliant SECS-II[4]
Accurate?

Configuration & options9

4900 va[1]
Accurate?
16 Fla[1]
Accurate?
Power/configuration
4900 va[1]
Accurate?
Floppy drives
16 Fla[1]
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Year of manufacture
1998[4]
Accurate?
Pattern recognition
Included[4]
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Storage
2GB hard drive[4]
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Display
LCD screen[4]
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Input devices
Keyboard and Trackball[4]
Accurate?

Vintage & configurations

  1. 1998Production start[4]

    Year of manufacture stated as 1998.

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage220 VAC[2]
  • ConfigurationSingle Phase[1]
  • Configuration50/60 Hz[1]
  • Maximum Single Load5 amps at 220 VAC[2]
  • PhaseSingle Phase[2]
  • Frequency50/60 Hz[2]
  • Computer platform266 MHz Pentium II Motherboard[4]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the MetaPulse 200 support?

The system supports 200 mm (8-inch) wafers.[1][2][4]

What is the measurement spot size?

The measurement spot size is 10 µm.[3]

What is the throughput of the MetaPulse 200?

The system can measure up to 60 wafers per hour.[3]

Not publicly documented

The following facts about the MetaPulse 200 Film Thickness Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented variants, configuration options, or revision breakpoints of the MetaPulse 200 Film Thickness Measurement are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the MetaPulse 200 Film Thickness Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MetaPulse 200 Film Thickness Measurement are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the MetaPulse 200 Film Thickness Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the MetaPulse 200 Film Thickness Measurement are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]MetaPULSE 200 — semiconductoronline.comsemiconductoronline.com
  4. [4]rawbw.com — rawbw.comrawbw.com
  5. [5]Inventory photo
  6. [6]Inventory photo
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Last updated Oct 4, 2026.

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