Nikon

S 308 F

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The Nikon S 308 F (also known as NSR-S308F) is a deep ultraviolet (ArF) lithography scanner for 200 mm and 300 mm wafers. The Nikon S 308 F achieves a resolution below 65 nm using a 0.92 numerical aperture lens and 193 nm wavelength. The Nikon S 308 F provides a throughput over 145 wafers per hour on 300 mm wafers and over 165 wph on 200 mm.^[1]

Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Performance

>145 wph^[1]

Optics

ArF (193 nm)^[1]

What it is

The Nikon S 308 F is a Nikon machine identified by model name S 308 F.^[2]

What do the numbers mean?

Wafer handling4

Wafer size: 200/300 mm^[1]
Wafer size (alternative): 12 inch^[2]
Throughput (300 mm): > 145 wafers/hour^[1]
Throughput (200 mm): > 165 wafers/hour^[1]

Optics & imaging7

Light source: ArF (193 nm)^[1]
Numerical aperture: 0.92^[1]
Exposure area: 26 x 33 mm^[1]
Resolution: <65 nm^[1]
Overlay accuracy: 8 nm^[1]
Wavelength: 193 nm^[1]
Lens NA: 0.92^[1]

Performance2

Throughput (300 mm): >145 wph^[1]
Throughput (200 mm): >165 wph^[1]

Control & software2

Polarization control: POLANO^[1]
Polarization Control: POLANO (optional)^[1]

Configuration & options2

HDD included^[2]
Reduction ratio: 1:4^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the wavelength of the Nikon S 308 F?

The Nikon S 308 F uses a wavelength of 193 nm.^[1]

What wafer sizes does the S 308 F support?

The S 308 F supports 200 mm and 300 mm wafers.^[1]^[2]

Not publicly documented

The following facts about the S 308 F are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 308 F are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 308 F are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 308 F are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 308 F are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 308 F is not on record.
Answerable by: an OEM datasheet or a fab qualification report