Waferpedia

Nikon

NWL 860 T Automatic Wafer

Metrology & InspectionNikon NWL 860 family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Nikon NWL 860 T Automatic Wafer Loader is an automatic wafer loader that includes a Nikon Optiphot 200 microscope. The Nikon NWL 860 T dates from 1998.[1]

NWL 860 T Automatic Wafer — Inventory photo
Fig. 01NWL 860 T Automatic WaferInventory photo[1]

What it is

The Nikon NWL 860 T is an automatic wafer loader. The loader is equipped with a Nikon Optiphot 200 microscope. The equipment was manufactured in 1998.[1]

How it works

The Nikon NWL 860 T is an automatic wafer loader that includes a Nikon Optiphot 200 microscope. The loader is designed to present wafers to the microscope for inspection.[1]

Applications

General reference — not yet source-verified

The primary application of an automatic wafer loader with an integrated microscope is optical inspection of semiconductor wafers. Common inspection tasks include defect detection, critical dimension measurement, overlay registration, pattern verification, and contamination monitoring. The tool is used in research and development as well as in high-volume manufacturing for inline quality control.

What do the numbers mean?

Configuration & options6

With Nikon Optiphot 200 Microscope[1]
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Asset #
71967[1]
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Make
Nikon[1]
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Model
NWL 860 T[1]
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Vintage
1998[1]
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Includes
Nikon Optiphot 200 Microscope[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the NWL 860 T Automatic Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NWL 860 T Automatic Wafer are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NWL 860 T Automatic Wafer are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NWL 860 T Automatic Wafer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NWL 860 T Automatic Wafer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NWL 860 T Automatic Wafer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Oct 3, 2026.

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