KLA
Surfscan SP 1 Particle Defect
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The KLA Surfscan SP 1 is a particle defect detection system for semiconductor wafers. Some units of the KLA Surfscan SP 1 support 12 inch wafers.[1][2]
What it is
General reference — not yet source-verifiedParticle defect inspection systems are a class of optical surface scanners used to find contamination and defects that can affect semiconductor device yield. Such systems are placed in the fab to qualify wafers before and after key process steps, ensuring that particles above a certain size are detected and quantified.
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Missing parts
What do the numbers mean?
Wafer handling1
Configuration & options5
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
How are these machines maintained and calibrated?General reference — not yet source-verified
Regular calibration uses reference wafers with known particle sizes to ensure measurement accuracy. Maintenance includes cleaning the optics, replacing laser modules if needed, and routine performance checks. The systems are designed for high uptime and automated calibration procedures.
Not publicly documented
The following facts about the Surfscan SP 1 Particle Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan SP 1 Particle Defect are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan SP 1 Particle Defect are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan SP 1 Particle Defect are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Surfscan SP 1 Particle Defect is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Surfscan SP 1 Particle Defect are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
- [3]inventory listing
- [4]Equipment inventory listing
Last updated Oct 3, 2026.
Compare with similar tools
View all →The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
