KLA
SFS 6100 Wafer Surface Analysis
The KLA SFS 6100 is a non-patterned wafer inspection system. The KLA SFS 6100 uses a laser-scattering technique to identify particles, scratches, pits, and other micro-defects. The KLA SFS 6100 has a sensitivity down to approximately 0.16 µm.[1]
What it is
The KLA SFS 6100 is a wafer surface analysis system. The KLA SFS 6100 is a non-patterned wafer inspection system.[3][1]
Where it fits in the process flow
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the KLA SFS 6100?
The KLA SFS 6100 is a wafer surface analysis system, specifically a non-patterned wafer inspection system.[3][1]
What manufacturer and model are identified?
The manufacturer is KLA and the model is SFS 6100, also known as the Surfscan SFS 6100.[2][1]
What wafer sizes does the KLA SFS 6100 support?
The system supports wafer sizes ranging from 4 inches to 8 inches.[1]
What is the defect detection sensitivity of the KLA SFS 6100?
The sensitivity is down to approximately 0.16 µm.[1]
Not publicly documented
The following facts about the SFS 6100 Wafer Surface Analysis are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SFS 6100 Wafer Surface Analysis are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SFS 6100 Wafer Surface Analysis are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SFS 6100 Wafer Surface Analysis are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SFS 6100 Wafer Surface Analysis are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SFS 6100 Wafer Surface Analysis is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]slideserve.com — slideserve.comslideserve.com
- [2]Inventory photo
- [3]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 3, 2026.
Compare with similar tools
View all →The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
