KLA

P 16 Surface

Metrology & Inspection KLA P family

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P 16 Surface — Inventory photo — Fig. 01P 16 SurfaceInventory photo^[1]

What it is

The KLA P 16 Surface is a surface profilometer in the metrology and inspection category.^[4]^[5]

The KLA P 16 Surface is a mechanical profilometer in the KLA P family.^[6]

How it works

General reference — not yet source-verified

A surface profilometer measures surface topography by mechanically tracing a stylus across a sample and converting vertical motion into height data.

A profilometer of this class is used to quantify step height, roughness, and other surface features on semiconductor and precision-manufactured parts.

Where it fits in the process flow

General reference — not yet source-verified

Surface profilometers are used in metrology and inspection to check film steps, etched features, and surface form during process development and production control.

The KLA P 16 Surface fits in the measurement flow after fabrication steps that create topography and before later process decisions that depend on dimensional feedback.

Applications

General reference — not yet source-verified

A surface profilometer is used for step-height measurement, surface profile measurement, and general topography inspection.

What do the numbers mean?

Optics & imaging2

Vertical resolution: 0.6 Å^[6]
Lateral resolution: 0.5 µm^[6]

Control & software1

Operating System: Windows XP^[5]

Configuration & options9

Windows XP^[4]; Extended range (max 1mm)^[4]; 3D option^[4]; Fully refurbished^[4]
Phase: 1 Phase^[2]
Extended range: 1 mm^[5]
3D option: Yes^[5]
Instrument type: Mechanical profilometer^[5]
Phase: Phase 1^[5]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of instrument is the KLA P 16 Surface?

The KLA P 16 Surface is a surface profilometer in metrology and inspection.^[5]

What class of profilometer is the KLA P 16 Surface?

The KLA P 16 Surface is a mechanical profilometer in the KLA P family.^[5]

Not publicly documented

The following facts about the P 16 Surface are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 16 Surface are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the P 16 Surface are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the P 16 Surface are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the P 16 Surface are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the P 16 Surface is not on record.
Answerable by: an OEM datasheet or a fab qualification report