KLA

Archer 200 AIM Overlay

Metrology & Inspection KLA Archer 200 AIM Overlay family

Research Quality: 20% complete

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KLAArcher 200 AIM Overlay

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What is it?

The KLA Archer 200 AIM Overlay is an overlay measurement system used in semiconductor metrology.

What do the numbers mean?

Wafer handling6

Wafer Size Maximum: 300 mm^[3]
Wafer Size Minimum: 200 mm^[3]
Cassette to Cassette: Yes^[3]
Number of Cassette Elevators: 2^[3]
Wafer Handling: Random Access Robot^[3]
Robot: Yaskawa Robot with NXC100 Controller^[3]

Control & software1

Floatation Controller: IDE Maxon 1000 Floatation Controller^[3]

Configuration & options10

Category: Metrology & Inspection^[1]
Manufacturer: KLA^[2]
Model: Archer 200 AIM^[2]
Year of Manufacture: 2006^[3]
Mini-Environment: Yes^[3]
Stage: ETAL Stage^[3]
Version: 300 mm^[4]
Vintage: 30.04.2010^[4]
Quantity: 1^[4]
Sales Condition: as is where is^[4]

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Not publicly documented

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Not publicly documented

The following facts about the Archer 200 AIM Overlay are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Archer 200 AIM Overlay are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Archer 200 AIM Overlay are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Archer 200 AIM Overlay are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Archer 200 AIM Overlay are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Archer 200 AIM Overlay is not on record.
Answerable by: an OEM datasheet or a fab qualification report