Karl Suss
PM5
The Karl Suss PM5 is a probe station. The Karl Suss PM5 supports single chips and up to 6-inch wafers. The Karl Suss PM5 includes a stereo microscope, a 6-inch vacuum chuck, four micromanipulators, and a light-tight enclosure.[1][2]
Wafer size
up to 6-inch wafers
Vacuum
6-inch vacuum chuck[1]
What it is
The Karl Suss PM5 is a manual probe station used for electrical characterization of wafers and substrates. The PM5 can probe single chips and wafers up to six inches on a vacuum chuck, and the identified configuration includes a stereo microscope, four micromanipulators, and a light-tight enclosure.[1][2]
How it works
General reference — not yet source-verifiedProbe stations in this class combine a stable stage, optical inspection, and precision probe positioning so that an operator can touch down on small features without removing the wafer from the test platform. Probe stations are commonly paired with source-measure and other characterization instruments to record current, voltage, and capacitance behavior.
Where it fits in the process flow
The PM5 is used for device testing workflows that include I-V and C-V measurements. The PM5 also supports four-point probe resistivity measurements when paired with a suitable setup.[1]
Applications
The PM5 is used for probing wafers and substrates in electrical characterization work. The PM5 is used for measuring the electrical properties of semiconductor devices and materials.[1]
- Electrical characterization
- Device testing
- I-V measurements
What do the numbers mean?
Vacuum & pumping1
Wafer handling4
- Applications
- DC and HF measurements; device and wafer characterization tests; failure analysis; submicron probing; MEMS and opto tests[3]
Configuration & options6
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Vacuum chuck6-inch vacuum chuck[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer size can the PM5 handle?
The PM5 can probe wafers and substrates up to six inches, and the identified vacuum chuck can accommodate single chips as well as up to six-inch wafers.[1]
What measurements is the PM5 used for?
The PM5 is used for I-V and C-V measurements, and the associated setup includes a four-point probe arrangement for resistivity measurement.[1]
Not publicly documented
The following facts about the PM5 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PM5 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PM5 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PM5 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PM5 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PM5 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]tmi.utexas.edu — tmi.utexas.edutmi.utexas.edu
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]pi.infn.itpi.infn.it
Last updated Oct 5, 2026.
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