Hitachi
S 4800 II
The Hitachi S 4800 II is a scanning electron microscope. The Hitachi S 4800 II has secondary electron image resolution values of 1.0 nm, 1.4 nm, and 2.0 nm. The Hitachi S 4800 II uses Windows XP.[1][2]
What it is
The Hitachi S 4800 II is a scanning electron microscope used in metrology and inspection.[3][1][2]
How it works
Where it fits in the process flow
General reference — not yet source-verifiedA scanning electron microscope in metrology and inspection supports process control by examining surface morphology, feature shape, and defect-related detail after fabrication steps.
Applications
What do the numbers mean?
Optics & imaging4
Control & software2
- Includes Installation CDs and software[3]
Configuration & options14
- No HDD or EDX[3]
- 1.0nm (15kV, WD+4mm)[1]
- 1.4nm (1kV, WD=1.5mm, Deceleration mode)[1]
- 2.0nm (1kV, WD-1.5mm, Normal mode)[1]
- Specimen Stage:[1]
- 5 Axis Stage Motorization[1]
- Specimen stage
- 5-axis stage motorization; Type KK: X 0 to 110 mm, Y 0 to 110 mm, Z 1.5 to 40 mm, T -5 to +70°, R 360°[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the S 4800 II are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 4800 II are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 4800 II are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 4800 II are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 4800 II are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 4800 II is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]S 4800 II — Hitachi | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]Inventory photo
- [4]fabsurplus.comfabsurplus.com
Last updated Oct 9, 2026.
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