Hitachi
S 4700 FE-SEM
The Hitachi S 4700 is a Field Emission Scanning Electron Microscope (FE-SEM) manufactured by Hitachi. The S 4700 has been available in configurations handling 4-inch and 6-inch wafers, with known examples from 1997 to 2005.[1][2][3]
What it is
How it works
General reference — not yet source-verifiedA field emission scanning electron microscope forms images by scanning a focused electron beam across a sample surface and detecting signals from the interaction of the beam with the specimen.
An electron microscope of this class supports high magnification surface imaging and detailed topographic inspection of small features.
Where it fits in the process flow
General reference — not yet source-verifiedA scanning electron microscope is typically used after patterning or other fabrication steps when a process engineer needs to inspect surface features, edges, particles, or defects.
The Hitachi S 4700 FE-SEM belongs in metrology and inspection workflows rather than in material deposition or lithography steps.
Applications
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.
- FESEM operating manual and capabilitiesSOPasu.edu
- Hitachi-S-4700-FESEM-SOP-Rev-I_0.pdfSOPasu.edu
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the S 4700 FE-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 4700 FE-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 4700 FE-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 4700 FE-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 4700 FE-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 4700 FE-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (11)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]inventory listing
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]Inventory photo
- [7]Inventory photo
- [8]Inventory photo
- [9]Inventory photo
- [10]Hitachi S-4700 Field Emission Scanning Electron Microscope - Core Research Facilities — cores.research.asu.educores.research.asu.edu
- [11]Hitachi S4700 SEM | UCLA Nanolab — nanolab.ucla.edunanolab.ucla.edu
Last updated Oct 8, 2026.
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