CHA
Mark 40 E-Beam
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The CHA Mark 40 is an electron-beam evaporator used for physical vapor deposition in semiconductor and thin-film processing.[1][2]
How it works
The CHA Mark 40 is equipped with a four-pocket electron-beam gun that can hold up to four different metal materials, enabling sequential deposition without breaking vacuum.[2]
The system includes a CHA SR10 electron-beam power supply, an Autotech II valve controller, and a CTI 8 cryopump with a CTI compressor, which maintain the high-vacuum environment required for clean deposition.[2]
Applications
General reference — not yet source-verifiedE-beam evaporators are used for depositing metal layers, contacts, and interconnects in semiconductor devices, as well as for optical coatings, magnetic thin films, and other thin-film applications.
What do the numbers mean?
Power & electrical1
Vacuum & pumping1
Wafer handling1
Optics & imaging1
Control & software1
Configuration & options3
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Mark 40 E-Beam are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Mark 40 E-Beam are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Mark 40 E-Beam are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Mark 40 E-Beam are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Mark 40 E-Beam are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Mark 40 E-Beam is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]semistarcorp.com — semistarcorp.comsemistarcorp.com
- [3]fabsurplus.comfabsurplus.com
Last updated Sep 22, 2026.
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