Bruker
Dimension 5000
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Bruker Dimension 5000 is an atomic force microscope (AFM) used for metrology and inspection. The Dimension 5000 supports sample sizes up to 300 mm diameter. The Dimension 5000 has a closed-loop positioning system with 1 µm resolution and 2 µm repeatability.[1][2][3]
What it is
The Bruker Dimension 5000 is an atomic force microscope (AFM) manufactured by Bruker and is also branded with Veeco. The Dimension 5000 is a large-sample AFM that supports wafers up to 300mm in diameter. The system uses a closed-loop encoder-based positioning system with a linear positioning resolution of 1μm and a bidirectional repeatability of 2μm. The system supports multiple imaging modes including AFM, STM, conductive AFM, scanning capacitance, and spreading resistance imaging. Controller options include NanoScope IIIA, IV, or V. The optical system provides a motorized zoom and focus with a field of view of 150–675μm, and the sample inspection area is 200mm square.[1][2]
How it works
The Dimension 5000 employs a closed-loop encoder-based positioning system for high-accuracy scanning. The system is controlled by a NanoScope controller (IIIA, IV, or V) and includes a motorized zoom and focus optical system for sample viewing.[2]
What do the numbers mean?
Optics & imaging2
Performance1
Control & software1
Configuration & options4
- Imaging Modes
- AFM, STM, Conductive AFM, Scanning Capacitance, and Spreading Resistance Imaging[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the sample size capability of the Dimension 5000?
The Dimension 5000 can accommodate samples up to 300mm in diameter.[2]
What imaging modes are supported?
The system supports AFM, STM, conductive AFM, scanning capacitance, and spreading resistance imaging.[2]
What controller options are available?
Controller options include NanoScope IIIA, IV, or V.[2]
What is the positioning system specification?
The positioning system is closed-loop encoder-based with 1μm linear resolution and 2μm bidirectional repeatability.[2]
What is the optical system specification?
The optical system is a motorized zoom and focus with a field of view of 150–675μm.[2]
Not publicly documented
The following facts about the Dimension 5000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Dimension 5000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Dimension 5000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Dimension 5000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Dimension 5000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Dimension 5000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]tarasemi.com — tarasemi.comtarasemi.com
- [3]Dimension 5000 — Bruker | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 1, 2026.
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