Bruker
Dektak XT Stylus
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Bruker Dektak XT is a 2D contact stylus surface profiler used for step height, pitch, and surface roughness measurements. The Dektak XT has a vertical resolution of 1 Å (0.1 nm) and a stylus force range of 1 to 15 mg.[1]
What it is
The Bruker Dektak XT Stylus is a stylus profilometer used for surface profiling and metrology.[3]
The Bruker Dektak XT Stylus measures thin and thick film thickness, step height, surface topography, waviness, and roughness.[3]
How it works
The Bruker Dektak XT Stylus can take two-dimensional surface profile measurements and can also produce three-dimensional measurements and analyses with the 3D Mapping option.[3]
The Bruker Dektak XT Stylus has a stylus force range from 1 mg to 15 mg, supports 2.0 µm and 12.5 µm radius tips, and has a vertical resolution of 0.1 nm.[3]
Where it fits in the process flow
The Bruker Dektak XT Stylus is used to measure step height, surface profile, and roughness on soft or hard surfaces.[3]
Applications
The Bruker Dektak XT Stylus is used for thin-film and thick-film thickness measurement, step-height measurement, surface topography measurement, waviness measurement, and roughness measurement.[3]
The Bruker Dektak XT Stylus is used on soft films and hard films, and its selectable stylus force and tip sizes support different feature scales.[3]
What do the numbers mean?
Wafer handling1
Optics & imaging2
Performance1
Control & software1
Configuration & options15
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of measurements does the Bruker Dektak XT Stylus perform?
The Bruker Dektak XT Stylus measures thin and thick film thickness, surface topography, waviness, roughness, and step height.[3]
Can the Bruker Dektak XT Stylus make three-dimensional measurements?
The Bruker Dektak XT Stylus can produce three-dimensional measurements and analyses with the 3D Mapping option.[3]
What stylus tip sizes are available on this system?
The Bruker Dektak XT Stylus has 2.0 µm and 12.5 µm radius tips available.[3]
What is the stylus force range?
The Bruker Dektak XT Stylus has a stylus force range from 1 mg to 15 mg.[3]
What is the vertical resolution?
The Bruker Dektak XT Stylus has a vertical resolution of 0.1 nm.[3]
Not publicly documented
The following facts about the Dektak XT Stylus are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Dektak XT Stylus are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Dektak XT Stylus are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Dektak XT Stylus are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Dektak XT Stylus are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Dektak XT Stylus is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]manualslib.com — manualslib.commanualslib.com
- [2]manualslib.com — manualslib.commanualslib.com
- [3]boisestate.edu — boisestate.eduboisestate.edu
- [4]Equipment inventory listing
Last updated Oct 10, 2026.
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